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Investigation of ionized metal flux in enhanced high power impulse magnetron sputtering discharges

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F14%3A10392145" target="_blank" >RIV/00216208:11320/14:10392145 - isvavai.cz</a>

  • Alternative codes found

    RIV/68378271:_____/14:00439381 RIV/60076658:12310/14:43887082

  • Result on the web

    <a href="https://doi.org/10.1063/1.4871635" target="_blank" >https://doi.org/10.1063/1.4871635</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1063/1.4871635" target="_blank" >10.1063/1.4871635</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Investigation of ionized metal flux in enhanced high power impulse magnetron sputtering discharges

  • Original language description

    The metal ionized flux fraction and production of double charged metal ions Me2+ of different materials (Al, Cu, Fe, Ti) by High Power Impulse Magnetron Sputtering (HiPIMS) operated with and without a pre-ionization assistance is compared in the paper. The Electron Cyclotron Wave Resonance (ECWR) discharge was employed as the pre-ionization agent providing a seed of charge in the idle time of HiPIMS pulses. A modified grid-free biased quartz crystal microbalance was used to estimate the metal ionized flux fraction xi. The energy-resolved mass spectrometry served as a complementary method to distinguish particular ion contributions to the total ionized flux onto the substrate. The ratio between densities of doubly Me2+ and singly Me+ charged metal ions was determined. It is shown that ECWR assistance enhances Me2+ production with respect of absorbed rf-power. The ECWR discharge also increases the metal ionized flux fraction of about 30% especially in the region of lower pressures. Further, the suppression of the gas rarefaction effect due to enhanced secondary electron emission of Me2+ was observed. (C) 2014 AIP Publishing LLC.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10305 - Fluids and plasma physics (including surface physics)

Result continuities

  • Project

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2014

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Journal of Applied Physics

  • ISSN

    0021-8979

  • e-ISSN

  • Volume of the periodical

    115

  • Issue of the periodical within the volume

    15

  • Country of publishing house

    US - UNITED STATES

  • Number of pages

    7

  • Pages from-to

  • UT code for WoS article

    000335227100006

  • EID of the result in the Scopus database

    2-s2.0-84899839301