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Investigation of ionized metal flux in enhanced high power impulse magnetron sputtering discharges

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00439381" target="_blank" >RIV/68378271:_____/14:00439381 - isvavai.cz</a>

  • Alternative codes found

    RIV/60076658:12310/14:43887082 RIV/00216208:11320/14:10392145

  • Result on the web

    <a href="http://dx.doi.org/10.1063/1.4871635" target="_blank" >http://dx.doi.org/10.1063/1.4871635</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1063/1.4871635" target="_blank" >10.1063/1.4871635</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Investigation of ionized metal flux in enhanced high power impulse magnetron sputtering discharges

  • Original language description

    The metal ionized flux fraction and production of double charged metal ions Me2? of different materials (Al, Cu, Fe, Ti) by High Power Impulse Magnetron Sputtering (HiPIMS) operated with and without a pre-ionization assistance is compared in the paper. The Electron Cyclotron Wave Resonance (ECWR) discharge was employed as the pre-ionization agent providing a seed of charge in the idle time of HiPIMS pulses. A modified grid-free biased quartz crystal microbalance was used to estimate the metal ionized flux fraction n. The energy-resolved mass spectrometry served as a complementary method to distinguish particular ion contributions to the total ionized flux onto the substrate. The ratio between densities of doubly Me2? and singly Me? charged metal ions was determined. It is shown that ECWR assistance enhances Me2? production with respect of absorbed rf-power.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/LH12043" target="_blank" >LH12043: A Study of thin films systems based on Iron Pyrite (FeS2) for Photonic Applications.</a><br>

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2014

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Journal of Applied Physics

  • ISSN

    0021-8979

  • e-ISSN

  • Volume of the periodical

    115

  • Issue of the periodical within the volume

    15

  • Country of publishing house

    US - UNITED STATES

  • Number of pages

    7

  • Pages from-to

    "153301-1"-"153301-7"

  • UT code for WoS article

    000335227100006

  • EID of the result in the Scopus database