Langmuir Probe Diagnostic in Gas Aggregation Cluster Source

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F16%3A10334537" target="_blank" >RIV/00216208:11320/16:10334537 - isvavai.cz</a>
Result on the web
<a href="http://www.mff.cuni.cz/veda/konference/wds/proc/pdf16/WDS16_26_f2_Kolpakova.pdf" target="_blank" >http://www.mff.cuni.cz/veda/konference/wds/proc/pdf16/WDS16_26_f2_Kolpakova.pdf</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Langmuir Probe Diagnostic in Gas Aggregation Cluster Source
Original language description
Deposition parameters and spatial variations of plasma parameters have been investigated in gas aggregation cluster source (GAS) with planar magnetron. Special construction of axially movable gas aggregation chamber in combination with radially movable Langmuir probe allows us to obtain 2D profiles of plasma parameters. In addition to probe diagnostic, we used quartz-crystal microbalance (QCM), mass spectrometer, and optical emission spectroscopy (OES) for simultaneous monitoring of plasma composition and deposition conditions. Measurements were performed in pure argon and in argon with oxygen admixture.
Czech name
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Czech description
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Project
<a href="/en/project/GA13-09853S" target="_blank" >GA13-09853S: Application of low temperature plasma in a gas aggregation cluster source for deposition of nanoparticles, nanostructured and nanocomposite films</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
WDS'16 Proceedings of Contributed Papers - Physics
ISBN
978-80-7378-333-4
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
155-160
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Prague, Czech Republic
Event date
Jun 7, 2016
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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