Study of Gas Aggregation Cluster Source by Means of Probe Diagnostic

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F17%3A10372301" target="_blank" >RIV/00216208:11320/17:10372301 - isvavai.cz</a>
Result on the web
<a href="https://www.mff.cuni.cz/veda/konference/wds/proc/pdf17/WDS17_19_f2_Kolpakova.pdf" target="_blank" >https://www.mff.cuni.cz/veda/konference/wds/proc/pdf17/WDS17_19_f2_Kolpakova.pdf</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Study of Gas Aggregation Cluster Source by Means of Probe Diagnostic
Original language description
Spatial profiles of plasma parameters were investigated in "diagnostic" gas aggregation cluster source (GAS). Nylon-sputtered nanoparticles (NPs) were prepared by means of GAS based on a planar RF magnetron with a Nylon target, which was sputtered in pure Ar. Plasma polymer particles originated in an aggregation chamber and travelled to a main (deposition) chamber with a gas flow through an orifice. The spatial profiles of plasma parameters were obtained by means of radially movable heated probe and thanks to special construction of axially movable gas aggregation chamber. Two situations were studied: (1) plasma without presence of nanoparticles and (2) plasma with production of nanoparticles.
Czech name
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Czech description
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Project
<a href="/en/project/GA15-00863S" target="_blank" >GA15-00863S: A study of impulse plasmatic systems for deposition of thin layers with applications in photonics</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
WDS'17 Proceedings of Contributed Papers — Physics
ISBN
978-80-7378-356-3
ISSN
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e-ISSN
neuvedeno
Number of pages
6
Pages from-to
121-126
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Prague, Czech Republic
Event date
Jun 6, 2017
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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