2D MoSe2 Structures Prepared by Atomic Layer Deposition
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F18%3A10425678" target="_blank" >RIV/00216208:11320/18:10425678 - isvavai.cz</a>
Alternative codes found
RIV/00216275:25310/18:39912663 RIV/00216305:26620/18:PU127552
Result on the web
<a href="https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=mwjL8.6dIW" target="_blank" >https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=mwjL8.6dIW</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/pssr.201800023" target="_blank" >10.1002/pssr.201800023</a>
Alternative languages
Result language
angličtina
Original language name
2D MoSe2 Structures Prepared by Atomic Layer Deposition
Original language description
Here, we demonstrate the preparation of 2D MoSe2 structures by the atomic layer deposition technique. In this work, we use ((CH3)(3)Si)(2)Se as the Se precursor and Mo(CO)(6) or MoCl5 as the Mo precursors. The X-ray photoelectron spectroscopy (XPS) analyses of the prepared samples have revealed that using the MoCl5 precursor the obtained structure of MoSe2 is nearly identical to the reference powder MoSe2 sample while the composition of the sample prepared from Mo(CO)(6) contains a significant amount of oxygen atoms. Further inspection of as-deposited samples via scanning electron microscopy (SEM), X-ray diffraction (XRD), and Raman spectroscopy has disclosed that the MoSe2 structure based on MoCl5 is formed from randomly oriented well crystalline flakes with their size approximate to 100nm in contrast to the Mo-Se-O compact film originating from Mo(CO)(6).
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
—
Continuities
—
Others
Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Physica Status Solidi - Rapid Research Letetrs
ISSN
1862-6254
e-ISSN
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Volume of the periodical
12
Issue of the periodical within the volume
5
Country of publishing house
DE - GERMANY
Number of pages
4
Pages from-to
1800023
UT code for WoS article
000433591900004
EID of the result in the Scopus database
2-s2.0-85048056037