Diagnostics of Surfatron-generated Plasma in PE-ALD Deposition System

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F20%3A10423647" target="_blank" >RIV/00216208:11320/20:10423647 - isvavai.cz</a>
Result on the web
<a href="https://www.mff.cuni.cz/veda/konference/wds/proc/pdf20/WDS20_15_f2_Kapran.pdf" target="_blank" >https://www.mff.cuni.cz/veda/konference/wds/proc/pdf20/WDS20_15_f2_Kapran.pdf</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Diagnostics of Surfatron-generated Plasma in PE-ALD Deposition System
Original language description
We present the diagnostic results of surfatron-generated plasma at different experimental conditions: chamber pressure, distance between the RF probe and the nozzle exit. The surfatron is a microwave plasma source for the ignition of surfacewave-sustained discharges. We used commercial surfatron (Sairem) and microwave generator with the maximum power of 1200 W. The characteristics of the generated plasma showed that the surfatron plasma source can generate low-temperature plasma in pressure ranging from 1 Pa up to 200 Pa. Mixtures of Ar (carrier gas), N2 and O2 (reactive gases) were used. The diagnostics of plasma was performed by means of Sobolewski probe measurement and optical emission spectroscopy.
Czech name
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Czech description
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Project
<a href="/en/project/GA19-00579S" target="_blank" >GA19-00579S: Advanced diagnostics of reactive HiPIMS plasma for deposition of oxide, nitride and sulfide layers</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
WDS'20 Proceedings of Contributed Papers — Physics
ISBN
978-80-7378-435-5
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
100-105
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Praha/ZOOM
Event date
Sep 22, 2020
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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