Computational fluid dynamics predicts the nanoparticle transport in gas aggregation cluster sources
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F22%3A10447811" target="_blank" >RIV/00216208:11320/22:10447811 - isvavai.cz</a>
Result on the web
<a href="https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=_G7GRNA-uO" target="_blank" >https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=_G7GRNA-uO</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6463/ac8c4e" target="_blank" >10.1088/1361-6463/ac8c4e</a>
Alternative languages
Result language
angličtina
Original language name
Computational fluid dynamics predicts the nanoparticle transport in gas aggregation cluster sources
Original language description
In a typical sputter-based gas aggregation cluster source (GAS), nanoparticles (NPs) are created from supersaturated vapours of the target material. The NPs then escape from the source with the expanding gas through an exit orifice. The carrier gas flow profile is one of the most critical parameters, which strongly affects the NP losses on the walls and determines the efficiency of the NP transport to the substrate. In this work, computational fluid dynamics (CFD) simulations are performed to understand the flow of the carrier gas inside the aggregation chamber. We focus on the impact of the inlet and outlet geometry on the carrier gas flow and, therefore, on the NP transportation. Two types of GAS with either a conventional planar magnetron or a cylindrical magnetron are considered. In the planar configuration, the working gas inlet is from behind the magnetron, and the gas flows around the target towards the orifice along the system axis, which may cause some vertices. The situation is even more critical for the cylindrical magnetron, where the gas inlet position and geometry have a drastic influence on the gas flow. Brownian diffusion is found to prevail for NPs smaller than 5 nm, regardless of the gas flow. This leads to their losses on the walls. Larger NPs experience a stronger drag force from the carrier gas flow, which should exceed 10 m s(-1) to prevent loss of NPs on the walls and keep NP transport efficient. Therefore, the CFD simulations help to visualise the motion of the NPs and optimise the geometry of the GAS for future applications.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
<a href="/en/project/GA21-12828S" target="_blank" >GA21-12828S: Plasma-assisted synthesis of liquid polymer-based nanofluids</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Physics D - Applied Physics
ISSN
0022-3727
e-ISSN
1361-6463
Volume of the periodical
55
Issue of the periodical within the volume
44
Country of publishing house
GB - UNITED KINGDOM
Number of pages
12
Pages from-to
445203
UT code for WoS article
000852039600001
EID of the result in the Scopus database
2-s2.0-85138441701