Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F00%3A00002371" target="_blank" >RIV/00216224:14310/00:00002371 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry

Original language description

In this paper results concerning the optical characterization of the inhomogeneous thin films of ZrO2 are presented. The optical characterization of these films is performed using the simultaneous interpretation of experimental data corresponding to variable angle of incidence spectroscopic ellipsometry (VASE) and near-normal incidence spectroscopic reflectometry (NNSR). It is shown that the ZrO2-films exhibit a depth inhomogeneity concerning their refractive indices. Further, it is shown that the ZrO2-films studied can be replaced by the four-layer system from the point of view of satisfactory fits of the experimental data. The values of the thicknesses and spectral dependences of the refractive indices of these four films are determined. Moreover, itis proved that the individual methods, i.e. VASE and especially NNSR, can not be separately used to characterize the ZrO2-films investigated.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2000

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Interface Analysis

ISSN

0142-2421

e-ISSN

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Volume of the periodical

30

Issue of the periodical within the volume

1

Country of publishing house

US - UNITED STATES

Number of pages

6

Pages from-to

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UT code for WoS article

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EID of the result in the Scopus database

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