Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F01%3A00004374" target="_blank" >RIV/00216224:14310/01:00004374 - isvavai.cz</a>

Alternative codes found

RIV/68081731:_____/01:12010040 RIV/00216305:26210/01:PU21428

Result on the web

—

DOI - Digital Object Identifier

—

Result language

angličtina

Original language name

Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy

Original language description

In this paper results concerning the complete optical analysis of inhomogeneous ZrO2-films are introduced. The optical analysis of these films is carried out using the combined optical method based on interpreting experimental data corresponding to variable angle of incidence spectroscopic ellipsometry (VASE) and near-normal incidence spectroscopic reflectometry (NNSR). The model of the ZrO$_2$-films used for the interpretation of the experimental data achieved using the combined method exhibits the continuous refractive index profile. It is shown that this model is satisfactory for treating the experimental data. Further, it is shown that all the parameters characterizing the model mentioned can be determined with a hight accuracy. By means of atomicforce microscopy (AFM) it is found that the upper boundaries of the inhomogeneous ZrO2-films are slightly rough. The values of the basic statistical quantities characterizing this boundary roughness are evaluated using the treatment of AF

Czech name

—

Czech description

—

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

—

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2001

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Interface Analysis

ISSN

0142-2421

e-ISSN

—

Volume of the periodical

32

Issue of the periodical within the volume

1

Country of publishing house

US - UNITED STATES

Number of pages

4

Pages from-to

91

UT code for WoS article

—

EID of the result in the Scopus database

—