Optical properties of diamond-like carbon films containing SiOx
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F03%3A00008251" target="_blank" >RIV/00216224:14310/03:00008251 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Optical properties of diamond-like carbon films containing SiOx
Original language description
In this paper the optical properties of amorphous DLC films containing SiOx (DLC:SiOx) prepared by plasma enhanced chemical vapour deposition are studied. For this study a combined optical method based on simultaneous interpretation of experimental dataobtained within variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry is used. The interpretation of these combined experimental data is performed using a new empirical dispersion model of the optical constants characterizing the films under investigation. This dispersion model is based on parameterizing the density of the electronic states belonging to both the valence and conduction bands. It is shown that there are the strong differences between spectral dependences ofthe optical constants of the DLC films on the one hand and DLC:SiOx films on the other hand. Further, it is shown that the absorption of the DLC:SiOx films is smaller than the absorption of the pure DLC films in the visible. This is expl
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA202%2F01%2F1110" target="_blank" >GA202/01/1110: Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2003
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Diamond and Related Materials
ISSN
0925-9635
e-ISSN
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Volume of the periodical
12
Issue of the periodical within the volume
9
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
7
Pages from-to
1532-1538
UT code for WoS article
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EID of the result in the Scopus database
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