Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F09%3A00029277" target="_blank" >RIV/00216224:14310/09:00029277 - isvavai.cz</a>

Alternative codes found

RIV/00177016:_____/09:#0000352 RIV/00216305:26210/09:PU79404

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

Original language description

Complete optical characterization of diamond-like carbon (DLC) films non-uniform in thickness is performed using spectroscopic imaging reflectometry (SIR). It is shown that by using this technique it is possible to determine the area distribution (area map) of the local thickness of these films with arbitrary shape of this thickness non-uniformity. Furthermore, it is shown that in principle it is possible to determine the distributions of the refractive index and extinction coefficient of these films simultaneously with the thickness distribution, if a suitable dispersion model of these optical constants is chosen. In this paper the dispersion model of the optical constants of the DLC films based on parameterization of density of electronic states (DOS) is used. The values of the material parameters of this dispersion model are determined too. It is shown that the DLC films studied do not exhibit the area non-uniformity in material parameters and optical constants.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2009

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Diamond and Related Materials

ISSN

0925-9635

e-ISSN

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Volume of the periodical

18

Issue of the periodical within the volume

2-3

Country of publishing house

CH - SWITZERLAND

Number of pages

4

Pages from-to

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UT code for WoS article

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EID of the result in the Scopus database

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