Effect of the Discharge Conditions on the Mechanical Properties of the Plasma Deposited DLC:SiOx Films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F03%3A00008312" target="_blank" >RIV/00216224:14310/03:00008312 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Effect of the Discharge Conditions on the Mechanical Properties of the Plasma Deposited DLC:SiOx Films

Original language description

Hard diamond like carbon films with insorporation of SiOx were deposited from mixture of methane and HMDSO. The Hardness, elastic modulus, interfacial fracture toughness and their dependence on the HMSDO to methane ratio were studied. The correlation between the discharge parameters and the film properties was determined.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proceedings of SAPP XIV

ISBN

80-8040-195-0

ISSN

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e-ISSN

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Number of pages

2

Pages from-to

197-198

Publisher name

Pavol Šutta, Jarmila Mullerová, and Róbert Brunner

Place of publication

Bratislava, Slovak Republic

Event location

Bobrovník, Slovak republic

Event date

Jan 13, 2003

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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