Correlation between SiOx content and properties of DLC : SiOx films prepared by PECVD.

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F03%3A49033170" target="_blank" >RIV/61389005:_____/03:49033170 - isvavai.cz</a>

Alternative codes found

RIV/00216224:14310/03:00021418

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Correlation between SiOx content and properties of DLC : SiOx films prepared by PECVD.

Original language description

Hard diamond-like carbon (DLC) films with an addition of SiOx were deposited in capacitively coupled r.f. discharges from a mixture of methane and hexamethyldisiloxane (HMDSO). The flow rate of HMDSO was changed in order to vary the SiOx content in the films. Complete atomic composition of the films was determined by Rutherford backscattering spectroscopy combined with elastic recoil detection analysis. The thickness and the optical properties were obtained from the ellipsometric measurements. The mechanical properties were studied by a depth sensing indentation technique using Fischerscope H100 tester. The O/Si ratio in DLC:SiOx films was 0.286 +/- 0.008 and the content of SiOx increased with the HMDSO-to-methane flow rate ratio q. The DLC:SiOx filmswere close to DLC films as concerning the optical properties in the UV/visible and the high hardness if q was maximum 0.25. However, the compressive stress in the films was reduced, the film fracture toughness was improved and the deposit

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/KSK1010104" target="_blank" >KSK1010104: Condensed matter physics and materials science</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

SURFACE & COATINGS TECHNOLOGY

ISSN

0257-8972

e-ISSN

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Volume of the periodical

174

Issue of the periodical within the volume

N/A

Country of publishing house

CH - SWITZERLAND

Number of pages

5

Pages from-to

281-285

UT code for WoS article

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EID of the result in the Scopus database

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