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Optical characterization of ZnSe thin films

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F03%3A00009333" target="_blank" >RIV/00216224:14310/03:00009333 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Optical characterization of ZnSe thin films

  • Original language description

    In this paper the optical method based on multisample modification variable angle spectroscopic ellipsometry (VASE) is used to characterize thin films of ZnSe prepared by molecular beam epitaxy onto GaAs single crystal substrates. It is found that this method can be employed for determining the spectral dependences of the optical constants and values of the thicknesses of the films mentioned. Moreover, it is shown that using this method the RMS values of the heights and the values of the correlation length characterizing roughness irregularities of the upper boundaries of the films can be determined as well. The application of the method is illustrated by means of characterizing six samples of the ZnSe-films exhibiting different values of the thicknesses.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BM - Solid-state physics and magnetism

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2003

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    19th Congress of the International Commission for Optics: Optics for the Quality of Life

  • ISBN

    0-8194-4596-7

  • ISSN

  • e-ISSN

  • Number of pages

    2

  • Pages from-to

    831-832

  • Publisher name

    SPIE - The International Society for Optical Engineering

  • Place of publication

    Bellingham, Washington, USA

  • Event location

    August 25-30, 2002, Florence, Italy

  • Event date

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article