The Role of Secondary Electrons in Low Pressure rf Glow Discharge

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F05%3A00024543" target="_blank" >RIV/00216224:14310/05:00024543 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

The Role of Secondary Electrons in Low Pressure rf Glow Discharge

Original language description

We concerned on the role of secondary electrons in low pressure rf glow discharge. The Particle in Cell/Monte Carlo computer simulations (PIC/MC) was applied to simulate the discharge. The influence of secondary electron emission yield (SEY) on the plasma density was studied. Furthermore the relative density and the electron energy probability function of secondary particles, i.e., secondary electrons and the products of ionizing collisions of secondary electrons was determined. We found that the secondary particles play very important role in this type of discharge. The relative density of secondary electrons created on electrodes is 2-10%, 5-15% for the value of SEY = 0.1, 0.2 respectively. But due to the high electric intensity in electrode sheathsthese electrons have relatively high energy and therefore they can ionize neutral atoms. As consequence of this the relative density of the secondary electrons (secondaries) and electrons created in ionizing collisions of the secondaries

Czech name

Role sekundarních elektronů v nízkotlakém rf doutnavém výboji

Czech description

V práci byla studována role sekundárních elektronů ve vf nízkotlakém doutnavém výboji. Ke studiu byla použita počítačová simulace (metoda PIC/MC). Byl studován vliv koeficientu sekundární emise (SEY) na koncentraci plazmatu. Dále byla určena relativní koncentrace a energiová rozdělovací funkce. Relativní koncentrace elektronů (vzhledem k celkové koncntraci plazmatu), vzniklých na elektrodě je 2-10% pro SEY = 0,1, resp. 5-15% pro SEY = 0,2. Díky vysoké intenzitě el. pole v elektrodové vrstvě získají tytoelektrony vysokou energii ionizují neutrální částice. Relativní koncentrace elektronů i iontů, vzniklých z ionizace sec. ele., je více než 20%.

Type

D - Article in proceedings

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

<a href="/en/project/GA202%2F03%2F0827" target="_blank" >GA202/03/0827: A study of elementary processes in low-temperature and technologically oriented plasmas and the development of relevant diagnostic methods</a><br>

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2005

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

WDS 2005 - Proceedings of Contributed Papers

ISBN

80-86732-59-2

ISSN

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e-ISSN

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Number of pages

6

Pages from-to

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Publisher name

MATFYZPRESS

Place of publication

Prague

Event location

Prague

Event date

Jun 7, 2005

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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