Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F06%3A00015920" target="_blank" >RIV/00216224:14310/06:00015920 - isvavai.cz</a>
Alternative codes found
RIV/68081723:_____/06:00043751
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique
Original language description
This work concerns the characterisation of mechanical properties of thin amorphous and microcrystalline silicon films deposited on glass and polyethylene terephthalate substrates. The film/substrate indentation response has been investigated from the near surface up to film/substrate interface using depth sensing indentation technique. The universal hardness, Vickers hardness, elastic modulus, fracture toughness and creep resistance of the studied films have been determined. Particular attention has been paid to the effects of the flexible viscoelastic-plastic substrate on the indentation response of the film/substrate system. (c) 2006 Elsevier B.V. All rights reserved.
Czech name
Studium mechanických vlastností tenkých křemíkových vrstev deponovaných na skleněné a plastové podložky instrumentovanou indentační technikou
Czech description
Studium mechanických vlastností tenkých křemíkových vrstev deponovaných na skleněné a plastové podložky instrumentovanou indentační technikou
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2006
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Non-Crystalline Solids
ISSN
0022-3093
e-ISSN
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Volume of the periodical
352
Issue of the periodical within the volume
9-20
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
4
Pages from-to
1242-1245
UT code for WoS article
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EID of the result in the Scopus database
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