Interdiffusion in SiGe alloys studied by x-rays

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F07%3A00020385" target="_blank" >RIV/00216224:14310/07:00020385 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Interdiffusion in SiGe alloys studied by x-rays

Original language description

We have investigated SiGe/Si multilayers annealed in-situ at temperatures in the range 780-830 C by x-ray diffraction. From the fits of reflectivity and diffraction we have obtained diffusion coeficients and activation energy for Ge content 50%.

Czech name

Interdifúze v SiGe slitinách studovaná pomocí rtg

Czech description

Studovali jsme SiGe/Si multivrstvy žíhané in-situ při teplotách v rozsahu 780-830 C pomocí rtg difrakce. Z fitování reflexe a difrakce jsme obdrželi difúzní koeficienty a aktivační energie pro obsah Ge 50%.

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/GP202%2F05%2FP286" target="_blank" >GP202/05/P286: Investigation of morphology of semiconductor multilayers using x-ray scattering</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2007

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Materials Structure in Chemistry, Biology, Physics and Technology

ISSN

1211-5894

e-ISSN

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Volume of the periodical

14

Issue of the periodical within the volume

2

Country of publishing house

CZ - CZECH REPUBLIC

Number of pages

2

Pages from-to

122-123

UT code for WoS article

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EID of the result in the Scopus database

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