Measurement of plasma potential waveform by an uncompensated probe
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F10%3A00043616" target="_blank" >RIV/00216224:14310/10:00043616 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Measurement of plasma potential waveform by an uncompensated probe
Original language description
A method is presented that enables measurement of plasma potential waveforms. The method consists of measurement by an uncompensated probe and analysis of the measured waveforms by means of a model of the sheath around the probe. The method was successfully tested in nitrogen capacitively coupled discharge. Strong influence of the sheath around the probe on the probe voltage and correlation between the probe current waveform and the discharge current are shown. At low pressure, the plasma potential waveform contains high amount of higher harmonic frequencies whose amplitudes are comparable with the amplitude of the fundamental frequency.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Plasma Sources Sci. Technol.
ISSN
0963-0252
e-ISSN
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Volume of the periodical
19
Issue of the periodical within the volume
2
Country of publishing house
GB - UNITED KINGDOM
Number of pages
6
Pages from-to
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UT code for WoS article
000275921200014
EID of the result in the Scopus database
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