Impact of neutral gas temperatures on reactive magnetron sputtering

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F10%3A00044481" target="_blank" >RIV/00216224:14310/10:00044481 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Impact of neutral gas temperatures on reactive magnetron sputtering
Original language description
Temperature is an important parameter which influences whole sputtering process. A model of reactive magnetron sputtering was used to investigate an effect of different temperatures in reactor during reactive sputtering on a hysteresis behaviour of the sputtering. We report shifts of transitions between two modes of a reactive sputtering process.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach<br>O - Projekt operacniho programu<br>R - Projekt Ramcoveho programu EK

Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Potential and Applications of Thin Ceramic and Metal Coatings
ISBN
978-80-7043-894-7
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
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Publisher name
University of West Bohemia
Place of publication
Plzeň
Event location
Plzeň
Event date
May 26, 2010
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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