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Behaviour of hybrid PVD-PECVD process of Ti sputtering in argon and acetylene atmosphere

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F10%3A00044659" target="_blank" >RIV/00216224:14310/10:00044659 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Behaviour of hybrid PVD-PECVD process of Ti sputtering in argon and acetylene atmosphere

  • Original language description

    Hybrid PVD-PECVD sputtering process was studied for the case of titanium target sputtering in argon and acetylene atmosphere. The hybrid PVD-PECVD process combines aspects of conventional sputtering of metal target with hydrocarbon vapour as a source ofcarbon. We present and discuss significant differences between behaviour of conventional reactive magnetron sputtering and such hybrid process.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)<br>O - Projekt operacniho programu

Others

  • Publication year

    2010

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Potential and Applications of Nanotretment of Medical Surface

  • ISBN

    978-80-7372-631-7

  • ISSN

  • e-ISSN

  • Number of pages

    2

  • Pages from-to

  • Publisher name

    Technical University of Liberec

  • Place of publication

    Liberec

  • Event location

    Liberec

  • Event date

    Aug 30, 2010

  • Type of event by nationality

    EUR - Evropská akce

  • UT code for WoS article