PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F12%3A00057155" target="_blank" >RIV/00216224:14310/12:00057155 - isvavai.cz</a>
Result on the web
<a href="http://www.chemicke-listy.cz/common/content-issue_s5-volume_106-year_2012.html" target="_blank" >http://www.chemicke-listy.cz/common/content-issue_s5-volume_106-year_2012.html</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD
Original language description
The aim of this work was to prepare a set of DLC films from different mixtures of precursor gases (methane, hydrogen, deuterium, nitrogen and/or HMDSO) using RFPECVD on substrates such as crystalline silicon, glass, and steel. The prepared films were characterized by several diagnostic tools and the properties of hydrogenated amorphous carbon films and the modified diamond-like carbon thin films with different admixtures (N, Si, O, D) were compared. Mechanical tests were performed on the obtained filmsmainly using depth sensing indentation method. We focused our attention on the following coating properties: hardness, elastic modulus, fracture toughness, film-substrate adhesion. Additionally, the effect of the internal stress on the indentation response of the filmsubstrate systems was studied. The tribological properties of the films were also investigated. The surface free energy of the films was performed by contact angle measuring technique.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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