Silicon-oxide Containing Diamond-like Carbon Coatings Prepared Using Plasma Enhanced Chemical Vapor Deposition

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F06%3A00502436" target="_blank" >RIV/49777513:23520/06:00502436 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Silicon-oxide Containing Diamond-like Carbon Coatings Prepared Using Plasma Enhanced Chemical Vapor Deposition
Original language description
Diamond-like carbon coatings with varous silicon-oxide content were deposited on different substrate materials. The structure of the prepared films was studied with infrared absorption spectroscopy (FTIR) and X-ray photoelectron spectroscopy. Complete atomic compositions, including hydrogen content and film densities, were determined by combination of RBS and ERD analyses. The complex dielectric function of the films was determined from ellipsometric measurements. The mechanical properties of prepared coatings were strudied by means of depth sensing indentation technique. The tribological properties were studied using pin-on-disc tester. The effect of intrinsic stress on the coating properties was investigated. The variation in SiOx concent enabled tominimize the intrinsic compressive stress in coatings.
Czech name
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Czech description
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Publication year
2006
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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