Thermal Desorption Spectroscopy Study on Diamond-like Carbon Films Modified by Silicon, Oxygen or Nitrogen
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F11%3A00368783" target="_blank" >RIV/61389005:_____/11:00368783 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Thermal Desorption Spectroscopy Study on Diamond-like Carbon Films Modified by Silicon, Oxygen or Nitrogen
Original language description
Diamond-like carbon coatings with various silicon-oxide content were deposited on different substrate materials (silicon, glass, polycarbonate and steel) in capacitively coupled r.f. discharge (13.56 MHz). Complete atomic compositions, including hydrogencontent and film densities, were determined by combination of RBS and ERD analyses. The complex dielectric function of the films was determined from ellipsometric measurements in the range 1.5-5.2 eV. The mechanical properties of prepared coatings (e.g.hardness, elastic modulus, fracture toughness, coating/substrate adhesion etc.) were studied by means of depth sensing indentation technique using Fischerscope H100 tester. The effect of intrinsic stress on the coating properties was investigated.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BG - Nuclear, atomic and molecular physics, accelerators
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA202%2F07%2F1669" target="_blank" >GA202/07/1669: Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
SAPP 18th Symposium on Application of Plasma Processes SAPP XVIII
ISBN
978-80-89186-77-8
ISSN
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e-ISSN
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Number of pages
55
Pages from-to
"pp.347"-"pp.402"
Publisher name
Department of Experimental Physics, Faculty of Mathematics,
Place of publication
Bratislava
Event location
Vrátna dolina
Event date
Jan 15, 2011
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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