Deposition and Characterization of Nanostructured Silicon-Oxide Containing Diamond-Like Carbon Coatings

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F07%3A00020754" target="_blank" >RIV/00216224:14310/07:00020754 - isvavai.cz</a>

Alternative codes found

RIV/68081723:_____/07:00090798 RIV/49777513:23210/07:00000008 RIV/68081723:_____/07:00323375 RIV/61389005:_____/07:00323375 and 2 more

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Deposition and Characterization of Nanostructured Silicon-Oxide Containing Diamond-Like Carbon Coatings

Original language description

Nanostructured diamond-like carbon coatings with various silicon-oxide content were deposited on different substrate materials (silicon, glass, polycarbonate and steel) in capacitively coupled r.f. discharge (13.56 MHz). The structure of the prepared films was studied with infrared absorption spectroscopy (FTIR) and X-ray photoelectron spectroscopy. Complete atomic compositions, including hydrogen content and film densities, were determined by combination of RBS and ERD analyses. The complex dielectricfunction of the films was determined from ellipsometric measurements in the range 1.5-5.2 eV. Matrix Assisted Laser Desorption-Ionisation - Time of Flight Mass Spectrometry (MALDI-TOF) was used to study the deposited films. The mechanical properties of prepared coatings (e.g. hardness, elastic modulus, fracture toughness, coating/substrate adhesion etc.) were studied by means of depth sensing indentation technique using Fischerscope H100 tester. The tribological properties were studied u

Czech name

Depozice a charakterizace nanostrukturovaných diamantu-podobných uhlíkových vrstev obsahujících oxid křemíku

Czech description

Nanostrukturované diamantu-podobné uhlíkové vrstvy s různým obsahem oxidu křemíku.

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2007

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Optoelectronics and Advanced Materials - Rapid Communications

ISSN

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e-ISSN

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Volume of the periodical

1

Issue of the periodical within the volume

10

Country of publishing house

RO - ROMANIA

Number of pages

5

Pages from-to

491-495

UT code for WoS article

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EID of the result in the Scopus database

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