Determination of sputtered species densities in a HIPIMS discharge by optical emission spectroscopy
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F14%3A00080621" target="_blank" >RIV/00216224:14310/14:00080621 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Determination of sputtered species densities in a HIPIMS discharge by optical emission spectroscopy
Original language description
Plasma emission from sputtered species is routinely measured in HIPIMS discharge with aim to e.g. assess ionized fraction of sputtered species, prove gas rarefaction or determine moment of transition from argon to metal dominated regimes. Direct measurements of the sputtered species ground state number densities is performed employing either laser induced fluorescence or absorption measurements. Since the ground or metastable levels of sputtered species do not produce any optical signal directly, it isdifficult to obtain information about the number densities of the species in these levels from optical emission spectroscopy. A variety of indirect methods, however, have been developed mainly for rare gases to obtain information about the metastable state number densities.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů