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Determination of sputtered species densities in a HIPIMS discharge by optical emission spectroscopy

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F14%3A00080621" target="_blank" >RIV/00216224:14310/14:00080621 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Determination of sputtered species densities in a HIPIMS discharge by optical emission spectroscopy

  • Original language description

    Plasma emission from sputtered species is routinely measured in HIPIMS discharge with aim to e.g. assess ionized fraction of sputtered species, prove gas rarefaction or determine moment of transition from argon to metal dominated regimes. Direct measurements of the sputtered species ground state number densities is performed employing either laser induced fluorescence or absorption measurements. Since the ground or metastable levels of sputtered species do not produce any optical signal directly, it isdifficult to obtain information about the number densities of the species in these levels from optical emission spectroscopy. A variety of indirect methods, however, have been developed mainly for rare gases to obtain information about the metastable state number densities.

  • Czech name

  • Czech description

Classification

  • Type

    O - Miscellaneous

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2014

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů