Universal dispersion model for characterization of optical thin films over wide spectral range: Application to hafnia
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F15%3A00080435" target="_blank" >RIV/00216224:14310/15:00080435 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1364/AO.54.009108" target="_blank" >http://dx.doi.org/10.1364/AO.54.009108</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1364/AO.54.009108" target="_blank" >10.1364/AO.54.009108</a>
Alternative languages
Result language
angličtina
Original language name
Universal dispersion model for characterization of optical thin films over wide spectral range: Application to hafnia
Original language description
A dispersion model capable of expressing the dielectric response of a broad class of optical materials in a wide spectral range from far IR to vacuum UV is described in detail. The application of this Universal Dispersion Model to a specific material isdemonstrated using the ellipsometric and spectrophotometric characterization of a hafnia film prepared by vacuum evaporation on silicon substrate. The characterization utilizes simultaneous processing of data from multiple techniques and instruments covering the wide spectral range and includes the characterization of roughness, non-uniformity, transition layer and native oxide layer on the back of the substrate. It is shown how the combination of measurements in light reflected from both side of the sample and transmitted light allows the separation of weak absorption in film and substrate.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Applied Optics
ISSN
1559-128X
e-ISSN
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Volume of the periodical
54
Issue of the periodical within the volume
31
Country of publishing house
US - UNITED STATES
Number of pages
12
Pages from-to
9108-9112
UT code for WoS article
000364455800043
EID of the result in the Scopus database
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