Effect of pulse off time on temporal evolution of sputtered species densities in multi-pulse HiPIMS discharge

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F15%3A00081303" target="_blank" >RIV/00216224:14310/15:00081303 - isvavai.cz</a>
Result on the web
<a href="https://munispace.muni.cz/index.php/munispace/catalog/book/792" target="_blank" >https://munispace.muni.cz/index.php/munispace/catalog/book/792</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Effect of pulse off time on temporal evolution of sputtered species densities in multi-pulse HiPIMS discharge
Original language description
The aim of this paper is to experimentally study effect of preceding pulse on the temporal evolution of number densities of sputtered species during the subsequent pulse for different delay time between two successive high-power pulses in the pulse packet. Time evolutions of sputtered species during and after pulse in single-pulse mode are presented, too. Intensities of selected lines of buffer gas were acquired during every measurement.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Potential Application of Plasma and Nanomaterials 2015
ISBN
9788021080539
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
22-27
Publisher name
Masaryk University
Place of publication
Brno
Event location
Brno
Event date
Jan 1, 2015
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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