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Pulse power supply for magnetron sputtering.

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F05%3APU54614" target="_blank" >RIV/00216305:26220/05:PU54614 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Pulse power supply for magnetron sputtering.

  • Original language description

    An experimental pulse power supply source for magnetron pulse sputtering has been designed and built. The mean power is 750 W with peak power capability up to 3 kW. The testing was performed on the own design magnetron sputtering device with good coolingcapability. Cathode voltage and cathode current were recorded during both ON-Pulse and OFF-Pulse. This monitoring of the target current and voltage shows that transient spikes occur and the waveforms differ from idealized behavior. The voltage spike at tthe beginning of the ON-Pulse brings high energy electrons into the magnetron discharge. Because the discharge current is low in the starting part of the ON-Pulse species created in this time are supposed to be more favorable for the generation of radicals than for sputtering. During the Off-Pulse the discharge current first decays rapidly and later more slowly to zero, but it is not falling to zero completely when the Off-Pulse is shorter than 10 &#956;s about. This two-step decay of t

  • Czech name

    Pulsní zdroj pro magnetronové naprašování

  • Czech description

    Byl sestaven pulsní zdroj pro magnetronové naprašování. Maximální výkon je 750 W s možností okamžitého výkonu v pulsu až 3 kW. Monitorování napětí a proudu katody magnetronu prokázalo, že na počátku každého napájecího pulsu je přechodový děj, ve kterám vznikají elektrony s velkou energií. Po odeznění přechodového děje se velikost energie elektronů v objemu plazmatu přibližuje hodnotě, která odpovídá stejnosměrnému napájení.

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JA - Electronics and optoelectronics

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2005

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Socrates Workshop

  • ISBN

    80-214-3042-7

  • ISSN

  • e-ISSN

  • Number of pages

    6

  • Pages from-to

    163-168

  • Publisher name

    Nakl. Novotný

  • Place of publication

    Brno

  • Event location

    Chania, Crete, Greece

  • Event date

    Sep 21, 2005

  • Type of event by nationality

    CST - Celostátní akce

  • UT code for WoS article