Pulse Power Source for Magnetron Sputtering

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F05%3APU54534" target="_blank" >RIV/00216305:26220/05:PU54534 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

čeština

Original language name

Zdroj pro Pulsní Magnetronové Naprašování.

Original language description

An experimental pulse power supply source for magnetron pulse sputtering has been designed and built. Maximal mean power is 750 W with peak power capability up to 3 kW. The testing was performed on the own design magnetron sputterinng device with good cooling capability. Cathode voltage and cathode current were recorded during the ON-Pulse and during the OFF-Pulse. Operating at low frequency range the magnetron voltage seemed to have square-wave characteristics. Monitoring the target current and voltagee waveforms during pulse operation shows that transient spikes occure and the waveforms differ from this idealized behavior. At the beginning of the ON-Pulse, there is a voltage spike which brings high energy electrons into the magnetron discharge. Because the discharge current is low in the starting part of the ON-Pulse species created in this time are supposed to be more favorable for the generation of radicals than for sputtering. During the Off-Pulse the discharge current first decay

Czech name

Zdroj pro Pulsní Magnetronové Naprašování.

Czech description

An experimental pulse power supply source for magnetron pulse sputtering has been designed and built. Maximal mean power is 750 W with peak power capability up to 3 kW. The testing was performed on the own design magnetron sputterinng device with good cooling capability. Cathode voltage and cathode current were recorded during the ON-Pulse and during the OFF-Pulse. Operating at low frequency range the magnetron voltage seemed to have square-wave characteristics. Monitoring the target current and voltagee waveforms during pulse operation shows that transient spikes occure and the waveforms differ from this idealized behavior. At the beginning of the ON-Pulse, there is a voltage spike which brings high energy electrons into the magnetron discharge. Because the discharge current is low in the starting part of the ON-Pulse species created in this time are supposed to be more favorable for the generation of radicals than for sputtering. During the Off-Pulse the discharge current first decay

Type

D - Article in proceedings

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2005

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Mikrosyn. Nové trendy v mikroelektronických systémech a nanotechnologiích. Sborník seminare. Brno 12.12.2005

ISBN

80-214-3116-4

ISSN

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e-ISSN

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Number of pages

6

Pages from-to

105-110

Publisher name

Nakl. Novotný

Place of publication

Brno

Event location

Brno

Event date

Dec 12, 2005

Type of event by nationality

CST - Celostátní akce

UT code for WoS article

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