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A comparison of different measurement methods of mechanical properties of Al thin films

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F15%3A00082748" target="_blank" >RIV/00216224:14310/15:00082748 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    A comparison of different measurement methods of mechanical properties of Al thin films

  • Original language description

    The paper compares two different methods for testing of metallic thin films: microcompression test and nanoindentation. Microcompression test is one possibility how to perform mechanical tests on a very small scale. This method requires preparation of asmall cylindrical specimen (micropillar) of micrometric size by FIB and execution of a compression test using nanoindenter device equipped with a flat diamond punch. Stressstrain curves of the thin films were obtained from such tests. Nanoindentation tests were then conducted to compare the results on the same films. Two different metal thin films - AlCuW, AlCuSi with thickness 2 mu m and grain size 3.8 mu m in average were prepared by PVD method. In this paper, we announce the results of measurements,a comparison of the results obtained by each method and identify advantages and limitations of the methods.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BM - Solid-state physics and magnetism

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/ED2.1.00%2F03.0086" target="_blank" >ED2.1.00/03.0086: Regional R&D center for low-cost plasma and nanotechnology surface modifications</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Others

  • Publication year

    2015

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    NANOCON 2014, 6th International Conference: Conference Proceedings

  • ISBN

    9788087294536

  • ISSN

  • e-ISSN

  • Number of pages

    6

  • Pages from-to

    753-758

  • Publisher name

    TANGER Ltd.

  • Place of publication

    Ostrava

  • Event location

    Brno

  • Event date

    Nov 5, 2014

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article

    000350636300129