A comparison of different measurement methods of mechanical properties of Al thin films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F15%3A00082748" target="_blank" >RIV/00216224:14310/15:00082748 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—
Alternative languages
Result language
angličtina
Original language name
A comparison of different measurement methods of mechanical properties of Al thin films
Original language description
The paper compares two different methods for testing of metallic thin films: microcompression test and nanoindentation. Microcompression test is one possibility how to perform mechanical tests on a very small scale. This method requires preparation of asmall cylindrical specimen (micropillar) of micrometric size by FIB and execution of a compression test using nanoindenter device equipped with a flat diamond punch. Stressstrain curves of the thin films were obtained from such tests. Nanoindentation tests were then conducted to compare the results on the same films. Two different metal thin films - AlCuW, AlCuSi with thickness 2 mu m and grain size 3.8 mu m in average were prepared by PVD method. In this paper, we announce the results of measurements,a comparison of the results obtained by each method and identify advantages and limitations of the methods.
Czech name
—
Czech description
—
Classification
Type
D - Article in proceedings
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
—
Result continuities
Project
<a href="/en/project/ED2.1.00%2F03.0086" target="_blank" >ED2.1.00/03.0086: Regional R&D center for low-cost plasma and nanotechnology surface modifications</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
NANOCON 2014, 6th International Conference: Conference Proceedings
ISBN
9788087294536
ISSN
—
e-ISSN
—
Number of pages
6
Pages from-to
753-758
Publisher name
TANGER Ltd.
Place of publication
Ostrava
Event location
Brno
Event date
Nov 5, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000350636300129