Estimation of mechanical properties of thin Al surface layer

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F12%3APU101927" target="_blank" >RIV/00216305:26210/12:PU101927 - isvavai.cz</a>
Alternative codes found
RIV/68081723:_____/12:00387893
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Estimation of mechanical properties of thin Al surface layer
Original language description
The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 microns and their height was about 2 microns. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.
Czech name
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Czech description
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Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
14th International Conference Applied Mechanics 2012
ISBN
978-80-261-0097-3
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
117-120
Publisher name
Neuveden
Place of publication
Neuveden
Event location
Plzeň
Event date
Apr 16, 2012
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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