APPLICATION OF FEM TO ESTIMATE OF MECHANICAL PROPERTIES OF THIN LAYERS
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F13%3APU107345" target="_blank" >RIV/00216305:26210/13:PU107345 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—
Alternative languages
Result language
angličtina
Original language name
APPLICATION OF FEM TO ESTIMATE OF MECHANICAL PROPERTIES OF THIN LAYERS
Original language description
This paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Experimentally measured data obtained on (micro) pillars need correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling (FEM) is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.
Czech name
—
Czech description
—
Classification
Type
O - Miscellaneous
CEP classification
JI - Composite materials
OECD FORD branch
—
Result continuities
Project
—
Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů