A Comparison of Different Measurement Method of Mechanical Properties of Al Thin Film
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F14%3A00437883" target="_blank" >RIV/68081731:_____/14:00437883 - isvavai.cz</a>
Alternative codes found
RIV/68081723:_____/14:00437883
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
A Comparison of Different Measurement Method of Mechanical Properties of Al Thin Film
Original language description
The paper compares two different methods for testing of metallic thin films: microcompression test and nanoindentation. Microcompression test is one possibility how to perform mechanical tests on a very small scale. This method requires preparation of asmall cylindrical specimen (micropillar) of micrometric size by FIB and execution of a compression test using nanoindenter device equipped with a flat diamond punch. Stressstrain curves of the thin films were obtained from such tests. Nanoindentation tests were then conducted to compare the results on the same films. Two different metal thin films ? AlCuW, AlCuSi with thickness 2 .mu.m and grain size 3.8 .mu.m in average were prepared by PVD method. In this paper, we announce the results of measurements, a comparison of the results obtained by each method and identify advantages and limitations of the methods.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
NANOCON 2014. 6th International conference proceedings
ISBN
978-80-87294-55-0
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
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Publisher name
TANGER
Place of publication
Ostrava
Event location
Brno
Event date
Nov 5, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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