GROWTH OF SILICON NANOWIRES BY THERMAL ANNEALING OF THICK GOLD CATALYTIC LAYER ON SILICON SUBSTRATE UNDER DIFFERENT ATMOSPHERES

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F15%3A00090296" target="_blank" >RIV/00216224:14310/15:00090296 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
GROWTH OF SILICON NANOWIRES BY THERMAL ANNEALING OF THICK GOLD CATALYTIC LAYER ON SILICON SUBSTRATE UNDER DIFFERENT ATMOSPHERES
Original language description
Silicon nanowires (Si NWs) were grown from Si wafer upon thermal annealing in the presence of catalytic gold layer. The Si substrate coated with 100 nm thick Au sputtered layer was thermally annealed at 1000 degrees C for 60 min in argon and hydrogen atmosphere at 8 kPa. The influence of argon and hydrogen atmospheres on the growth of Si NWs was investigated. It was found that by using the hydrogen atmosphere we were able to grow Si NWs, while the growth in argon atmosphere was sporadic. The catalytic layer morphology and composition were examined using atomic force microscopy and laser desorption-ionization time of flight mass spectrometry, while nanowire structure was observed through scanning electron microscope and energy dispersive X-ray spectroscopy.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
NANOCON 2015: 7TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION
ISBN
9788087294635
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
79-84
Publisher name
TANGER LTD
Place of publication
SLEZSKA
Event location
Brno, CZECH REPUBLIC
Event date
Oct 14, 2015
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000374708800012

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