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Nucleation and growth of metal-catalyzed silicon nanowires under plasma

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F20%3A00539179" target="_blank" >RIV/68378271:_____/20:00539179 - isvavai.cz</a>

  • Alternative codes found

    RIV/00216305:26620/20:PU140207

  • Result on the web

    <a href="https://doi.org/10.1088/1361-6528/ab76ef" target="_blank" >https://doi.org/10.1088/1361-6528/ab76ef</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1088/1361-6528/ab76ef" target="_blank" >10.1088/1361-6528/ab76ef</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Nucleation and growth of metal-catalyzed silicon nanowires under plasma

  • Original language description

    We report the results of a microscopic study of the nucleation and early growth stages of metal-catalyzed silicon nanowires in plasma-enhanced chemical vapor deposition. The nucleation ofsilicon nanowires is investigated as a function of different deposition conditions and metalcatalysts(Sn, In and Au)using correlation of atomic force microscopy and scanning electronmicroscopy. This correlation method enabled us to visualize individual catalytic nanoparticlesbefore and after the nanowire growth and identify the key parameters influencing the nanowirenucleation under plasma. The size and position of catalytic nanoparticles are found to play asignificant role in the nucleation. We demonstrate that only small isolated nanoparticles in therange of 10–20 nm contribute to the nanowire growth under plasma, while larger nanoparticlesare inactive because they get buried under a layer of a-Si:H before reaching supersaturation.Systematic analysis of different growth parameters reveals that the nanowire growth in plasmacontradicts the vapor–liquid–solid mechanism at thermal equilibrium in many ways. Thenanowire growth is much faster and proceeds even at negligible silicon solubility and bellow theeutectic temperature of the metal-silicon alloy. Based on the observations, we propose thenanowire growth under plasma to be characterized by the rapid solidification mechanism, wherea crystalline silicon phase emerges from a metastable supersaturated liquid metal-silicon phase inlocal nonequilibrium.n

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2020

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Nanotechnology

  • ISSN

    0957-4484

  • e-ISSN

  • Volume of the periodical

    31

  • Issue of the periodical within the volume

    22

  • Country of publishing house

    GB - UNITED KINGDOM

  • Number of pages

    11

  • Pages from-to

    1-11

  • UT code for WoS article

    000521482000001

  • EID of the result in the Scopus database

    2-s2.0-85082094165