Nucleation and growth of metal-catalyzed silicon nanowires under plasma
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F20%3A00539179" target="_blank" >RIV/68378271:_____/20:00539179 - isvavai.cz</a>
Alternative codes found
RIV/00216305:26620/20:PU140207
Result on the web
<a href="https://doi.org/10.1088/1361-6528/ab76ef" target="_blank" >https://doi.org/10.1088/1361-6528/ab76ef</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6528/ab76ef" target="_blank" >10.1088/1361-6528/ab76ef</a>
Alternative languages
Result language
angličtina
Original language name
Nucleation and growth of metal-catalyzed silicon nanowires under plasma
Original language description
We report the results of a microscopic study of the nucleation and early growth stages of metal-catalyzed silicon nanowires in plasma-enhanced chemical vapor deposition. The nucleation ofsilicon nanowires is investigated as a function of different deposition conditions and metalcatalysts(Sn, In and Au)using correlation of atomic force microscopy and scanning electronmicroscopy. This correlation method enabled us to visualize individual catalytic nanoparticlesbefore and after the nanowire growth and identify the key parameters influencing the nanowirenucleation under plasma. The size and position of catalytic nanoparticles are found to play asignificant role in the nucleation. We demonstrate that only small isolated nanoparticles in therange of 10–20 nm contribute to the nanowire growth under plasma, while larger nanoparticlesare inactive because they get buried under a layer of a-Si:H before reaching supersaturation.Systematic analysis of different growth parameters reveals that the nanowire growth in plasmacontradicts the vapor–liquid–solid mechanism at thermal equilibrium in many ways. Thenanowire growth is much faster and proceeds even at negligible silicon solubility and bellow theeutectic temperature of the metal-silicon alloy. Based on the observations, we propose thenanowire growth under plasma to be characterized by the rapid solidification mechanism, wherea crystalline silicon phase emerges from a metastable supersaturated liquid metal-silicon phase inlocal nonequilibrium.n
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Nanotechnology
ISSN
0957-4484
e-ISSN
—
Volume of the periodical
31
Issue of the periodical within the volume
22
Country of publishing house
GB - UNITED KINGDOM
Number of pages
11
Pages from-to
1-11
UT code for WoS article
000521482000001
EID of the result in the Scopus database
2-s2.0-85082094165