In-situ Mueller matrix ellipsometry of silicon nanowires grown by plasma-enhanced vapor-liquid-solid method for radial junction solar cells

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27640%2F17%3A10236967" target="_blank" >RIV/61989100:27640/17:10236967 - isvavai.cz</a>
Alternative codes found
RIV/61989100:27740/17:10236967
Result on the web
<a href="https://ac.els-cdn.com/S0169433216329312/1-s2.0-S0169433216329312-main.pdf?_tid=d1aa9fc0-fb8e-11e7-b243-00000aacb35f&acdnat=1516197828_27d891081ea7385821a0b24a55893424" target="_blank" >https://ac.els-cdn.com/S0169433216329312/1-s2.0-S0169433216329312-main.pdf?_tid=d1aa9fc0-fb8e-11e7-b243-00000aacb35f&acdnat=1516197828_27d891081ea7385821a0b24a55893424</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.apsusc.2016.12.199" target="_blank" >10.1016/j.apsusc.2016.12.199</a>

Result language
angličtina
Original language name
In-situ Mueller matrix ellipsometry of silicon nanowires grown by plasma-enhanced vapor-liquid-solid method for radial junction solar cells
Original language description
In-situ Mueller matrix spectroscopic ellipsometry was applied for monitoring the silicon nanowire growth by plasma-enhanced vapor-liquid-solid method. The technique is proposed as a real-time, non-destructive, and non-invasive characterization of the deposition process in a plasma-enhanced chemical vapor deposition reactor. The data have been taken by spectrally resolved Mueller matrix ellipsometer every 1 min during the 8-10 min long nanowire growth process. We have developed an easy-to-apply optical model to fit the experimental data, which enables to study the evolution of the parameters of the structure during initial stages of the growth. The first results provide information about the effective deposition rate determined from the linear increase of the deposited silicon volume with the deposition time.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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