Approximate methods for the optical characterization of inhomogeneous thin films: Applications to silicon nitride films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F19%3A00111214" target="_blank" >RIV/00216224:14310/19:00111214 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.2478/jee-2019-0037" target="_blank" >https://doi.org/10.2478/jee-2019-0037</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.2478/jee-2019-0037" target="_blank" >10.2478/jee-2019-0037</a>
Alternative languages
Result language
angličtina
Original language name
Approximate methods for the optical characterization of inhomogeneous thin films: Applications to silicon nitride films
Original language description
In this paper the overview of the most important approximate methods for the optical characterization of inhomogeneous thin films is presented. The following approximate methods are introduced: Wentzel-Kramers-Brillouin-Jeffreys approximation, method based on substituting inhomogeneous thin films by multilayer systems, method based on modifying recursive approach and method utilizing multiple-beam interference model. Principles and mathematical formulations of these methods are described. A comparison of these methods is carried out from the practical point of view, ie advantages and disadvantages of individual methods are discussed. Examples of the optical characterization of three inhomogeneous thin films consisting of non-stoichiometric silicon nitride are introduced in order to illustrate efficiency and practical meaning of the presented approximate methods.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
<a href="/en/project/LO1411" target="_blank" >LO1411: Development of Centre for low-cost plasma and nanotechnology surface modification</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Electrical Engineering
ISSN
1335-3632
e-ISSN
1339-309X
Volume of the periodical
70
Issue of the periodical within the volume
7
Country of publishing house
SK - SLOVAKIA
Number of pages
11
Pages from-to
16-26
UT code for WoS article
000489301300002
EID of the result in the Scopus database
2-s2.0-85073451699