Revisiting particle dynamics in HiPIMS discharges. I. General effects
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F20%3A00114256" target="_blank" >RIV/00216224:14310/20:00114256 - isvavai.cz</a>
Result on the web
<a href="http://aip.scitation.org/doi/10.1063/5.0009378" target="_blank" >http://aip.scitation.org/doi/10.1063/5.0009378</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/5.0009378" target="_blank" >10.1063/5.0009378</a>
Alternative languages
Result language
angličtina
Original language name
Revisiting particle dynamics in HiPIMS discharges. I. General effects
Original language description
A detailed experimental study of high power impulse magnetron sputtering processes is performed by time-resolved imaging of the ground state sputtered particles. New details related to the behavior of both neutral and singly ionized atoms are shown, as a result of separate treatment of the plasma-on and plasma-off time phases. In Paper I, the ion/neutral density redistribution in the ionization zone during sputtering is analyzed; the role of main discharge parameters, such as pulse repetition rate, pulse energy, etc., is discussed systematically. The time-resolved evolution of the ground state levels population for both sputtered neutrals and ions is also considered. In addition, propagation of the sputtered particles is analyzed using 2D density gradient diagrams calculated based on the measured particle density distributions. The results of this work are compared, when possible, to the data obtained previously [Britun et al., J. Appl. Phys. 117, 163302 (2015)].
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of applied physics
ISSN
0021-8979
e-ISSN
1089-7550
Volume of the periodical
128
Issue of the periodical within the volume
4
Country of publishing house
US - UNITED STATES
Number of pages
14
Pages from-to
1-14
UT code for WoS article
000557312900001
EID of the result in the Scopus database
2-s2.0-85090005435