Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F20%3A00114257" target="_blank" >RIV/00216224:14310/20:00114257 - isvavai.cz</a>
Result on the web
<a href="http://aip.scitation.org/doi/10.1063/5.0009380" target="_blank" >http://aip.scitation.org/doi/10.1063/5.0009380</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/5.0009380" target="_blank" >10.1063/5.0009380</a>
Alternative languages
Result language
angličtina
Original language name
Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects
Original language description
A detailed experimental study of high power impulse magnetron sputtering discharges is performed using time-resolved ground state density mapping of the sputtered neutrals and ions. This Paper deals with the effects related to the plasma-on phase and can be considered as an extension of Paper I being published simultaneously. The influence of plasma pulse duration, pulse energy, gas pressure as well as molecular oxygen admixture on the spatial and temporal particle density evolution is examined. Special attention is given to the temporal evolution of the ionization fraction distribution of the sputtered atoms. In addition, the 2D vector maps reflecting particle propagation, sputtering, and ionization in the discharge volume are also presented and discussed, similarly to the first part of this study [J. Appl. Phys. 128, 043303 (2020)].
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Applied Physics
ISSN
0021-8979
e-ISSN
1089-7550
Volume of the periodical
128
Issue of the periodical within the volume
4
Country of publishing house
US - UNITED STATES
Number of pages
12
Pages from-to
1-12
UT code for WoS article
000557312900002
EID of the result in the Scopus database
2-s2.0-85090004468