Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed dc magnetron discharges for ionized high-rate sputtering

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F02%3A00070767" target="_blank" >RIV/49777513:23520/02:00070767 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—

Result language
angličtina
Original language name
Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed dc magnetron discharges for ionized high-rate sputtering
Original language description
The paper deals with pulsed dc magnetron discharges proposed for ionized and high-rate sputtering of thin films. Time-resolved optical emission spectroscopy was used to characterize the ionization degree of copper (target) and argon (working gas) atoms,and the relative density of copper atoms in front of a sputtered copper target and in a plasma bulk during pulses. Energy-resolved mass spetroscopy with time resolution was carried out in front of a substrate to investigate the energy distribution of copper and argon ions, and their fractions in ion fluxes on the grounded substrate.
Czech name
—
Czech description
—

Project
<a href="/en/project/ME%20203" target="_blank" >ME 203: New plasma systems for preparation of thin films</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2002
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed dc magnetron discharges for ionized high-rate sputtering
ISBN
0953910512
ISSN
—
e-ISSN
—
Number of pages
4
Pages from-to
92
Publisher name
University of Liverpool
Place of publication
Liverpool
Event location
Liverpool
Event date
Jan 1, 2002
Type of event by nationality
CST - Celostátní akce
UT code for WoS article
—

Similar results(10)