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Time-resolved optical emission spectroscopy of pulsed dc magnetron sputtering plasmas

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F03%3A00000033" target="_blank" >RIV/49777513:23520/03:00000033 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Time-resolved optical emission spectroscopy of pulsed dc magnetron sputtering plasmas

  • Original language description

    Relative densities of cooper (target) atoms and ions, and argon (working gas)atoms and ions were investigated in front of a sputtered target and in a plasma bulk during voltage pulses and in pauses between them by means of time-resolved optical emissionspectroscopy.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2003

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    XXVI International Conference on Phenomena in Ionized Gases, Volume 1

  • ISBN

    3-00-011689-3

  • ISSN

  • e-ISSN

  • Number of pages

    2

  • Pages from-to

    139-140

  • Publisher name

    Local Organizing Committee

  • Place of publication

    Greifswald

  • Event location

    Greifswald

  • Event date

    Jul 15, 2003

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article