Time-resolved optical emission spectroscopy of pulsed dc magnetron sputtering plasmas
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F03%3A00000033" target="_blank" >RIV/49777513:23520/03:00000033 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Time-resolved optical emission spectroscopy of pulsed dc magnetron sputtering plasmas
Original language description
Relative densities of cooper (target) atoms and ions, and argon (working gas)atoms and ions were investigated in front of a sputtered target and in a plasma bulk during voltage pulses and in pauses between them by means of time-resolved optical emissionspectroscopy.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2003
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
XXVI International Conference on Phenomena in Ionized Gases, Volume 1
ISBN
3-00-011689-3
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
139-140
Publisher name
Local Organizing Committee
Place of publication
Greifswald
Event location
Greifswald
Event date
Jul 15, 2003
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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