Study of graphene layer growth on dielectric substrate in microwave plasma torch at atmospheric pressure

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F20%3A00114284" target="_blank" >RIV/00216224:14310/20:00114284 - isvavai.cz</a>

Alternative codes found

RIV/00216305:26620/20:PU140208

Result on the web

<a href="https://www.sciencedirect.com/science/article/pii/S0925963519308271" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0925963519308271</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.diamond.2020.107798" target="_blank" >10.1016/j.diamond.2020.107798</a>

Result language

angličtina

Original language name

Study of graphene layer growth on dielectric substrate in microwave plasma torch at atmospheric pressure

Original language description

The initial stage of graphene layer deposition on silicon oxide substrate by ethanol decomposition in dual-channel microwave plasma torch at atmospheric pressure was studied in dependence on precursor flow rate and delivered microwave power. Depending on ethanol flow rate and substrate temperature, horizontally or vertically aligned graphene nanosheets with various density could be prepared directly on dielectric substrate. In the regime with high microwave power, above 400 W, mixture of amorphous carbon particles and graphene sheets was deposited on the substrate. Prepared layers were analyzed by scanning electron microscopy (SEM), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). The microwave plasma diagnostics was carried out using optical emission spectroscopy (OES). The sample analysis showed increasing density of horizontally aligned carbon nanosheets with increasing ethanol flow rate and their delamination and transition into vertically aligned graphene sheets with increasing substrate temperature. The Raman spectroscopy analysis of layers showed presence of D (1345 cm(-1)), G (1585 cm(-1)) and 2D (2685 cm(-1)) peaks with 2D/G ratio of 1.59 and full width at half maximum (FWHM) of 2D peak was 42 cm(-1), corresponding to few layer graphene structure. In case of amorphous nanoparticles deposition, the D* peak at 1210 cm(-1) and D** at 1500 seem-1 was observed in Raman spectra with D/G ratio of 1.19 and Cls XPS spectra of carbon contained 20.4 at.% of spa carbon phase in comparison to 8.3 at.% in case of graphene nanosheets layer. High D/G ratio, up to 3.5, and low intensity 2D band was characteristic for vertically aligned graphene nanosheets layers. The possibility to influence density and size of graphene nanosheets on substrate represents promising alternative for future deposition of graphene on arbitrary substrate.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10305 - Fluids and plasma physics (including surface physics)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2020

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Diamond and Related Materials

ISSN

0925-9635

e-ISSN

1879-0062

Volume of the periodical

105

Issue of the periodical within the volume

May 2020

Country of publishing house

CH - SWITZERLAND

Number of pages

9

Pages from-to

1-9

UT code for WoS article

000540291200014

EID of the result in the Scopus database

2-s2.0-85081563445