The role of microwave plasma temperature during graphene nanosheets deposition on dielectric substrate: Modelling and experiment
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F20%3A00114695" target="_blank" >RIV/00216224:14310/20:00114695 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.37904/nanocon.2019.8455" target="_blank" >http://dx.doi.org/10.37904/nanocon.2019.8455</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.37904/nanocon.2019.8455" target="_blank" >10.37904/nanocon.2019.8455</a>
Alternative languages
Result language
angličtina
Original language name
The role of microwave plasma temperature during graphene nanosheets deposition on dielectric substrate: Modelling and experiment
Original language description
The relation between plasma temperature and properties of graphene nanosheet layer deposited on Si/SiO2 substrate by decomposition of ethanol in microwave plasma torch discharge at atmospheric pressure was investigated in dependence on delivered microwave power and gas flow rates. Plasma modelling was carried out using COMSOL Multiphysics software with delivered microwave power, gas flow rates and experimental reactor geometry as input parameters. Results of the heat flow and fluid dynamics modelling were compared with substrate temperature measured by thermocouple integrated in quartz tube substrate holder. The graphene nanosheets layer was characterized by SEM, Raman spectroscopy and 4-point probe method. The layers were severals tens of micrometre thick and their sheet resistance varied from 2 to 40 kiloohm/sq. The properties of individual graphene nanosheets, 2D/G and D/G Raman band ratio, as well as the sheet resistance of their conductive network were correlated with the increase of plasma temperature with increasing microwave power. The substrate temperature increased linearly with delivered microwave power and the layer sheet resistance was decreasing with increasing microwave power and saturated at 2 kiloohm/sq and D/G ratio of 0.6.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
NANOCON Conference Proceedings - International Conference on Nanomaterials
ISBN
9788087294956
ISSN
2694-930X
e-ISSN
—
Number of pages
5
Pages from-to
80-84
Publisher name
TANGER Ltd.
Place of publication
Ostrava
Event location
Brno
Event date
Oct 16, 2019
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000664115400012