Thermal stability of Ti/Ni multilayer Thin films

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F21%3A00118928" target="_blank" >RIV/00216224:14310/21:00118928 - isvavai.cz</a>
Alternative codes found
RIV/68081723:_____/21:00549491 RIV/68081731:_____/21:00549491
Result on the web
<a href="https://doi.org/10.37904/nanocon.2020.3776" target="_blank" >https://doi.org/10.37904/nanocon.2020.3776</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.37904/nanocon.2020.3776" target="_blank" >10.37904/nanocon.2020.3776</a>

Result language
angličtina
Original language name
Thermal stability of Ti/Ni multilayer Thin films
Original language description
In this work, thermal stability and mechanical properties of Ti/Ni multilayer thin films were studied. The multilayer thin films were synthesised by alternately depositing Ti and Ni layers using magnetron sputtering. The thickness of constituent layers of Ti and Ni varied from 1.7 nm to 10 nm, and one coating was deposited by simultaneous sputtering of both targets. Single crystalline silicon was used as a substrate. The effects of thermal treatment on the mechanical properties were studied using nanoindentation and discussed in relation to microstructure evaluated by X-ray diffraction. Annealing was carried out under low-pressure conditions for 2 hours in the range of 100–800°C.
Czech name
—
Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
NANOCON 2020: 12th International Conference on Nanomaterials - Research & Application
ISBN
9788087294987
ISSN
2694-930X
e-ISSN
—
Number of pages
6
Pages from-to
518-523
Publisher name
TANGER Ltd.
Place of publication
Ostrava
Event location
Brno, Czech Republic
Event date
Oct 21, 2020
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000664505500088

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