Quantifying argon and metal ion fluxes in HiPIMS using a biasable QCM
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F25%3A00142453" target="_blank" >RIV/00216224:14310/25:00142453 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1016/j.surfcoat.2025.132847" target="_blank" >https://doi.org/10.1016/j.surfcoat.2025.132847</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2025.132847" target="_blank" >10.1016/j.surfcoat.2025.132847</a>
Alternative languages
Result language
angličtina
Original language name
Quantifying argon and metal ion fluxes in HiPIMS using a biasable QCM
Original language description
This paper presents measurements of particle fluxes at the substrate during a HiPIMS discharge using a novel biasable quartz crystal microbalance system, enabling detection of Ti neutrals, Ti ions, and, for the first time, Ar ions. Two target geometries were compared at equal power density and peak current density, and two different power supplies were tested under nominally identical conditions to assess the role of generator design. The study shows that particle fluxes are strongly affected by target geometry, pressure, and generator type. The rectangular target produced higher and more variable fluxes than the circular one, while increasing pressure consistently reduced them. Differences between generators mainly influenced the balance between Ti neutrals and ions, whereas Ar ion fluxes remained similar. Overall, Ar ion fluxes were consistently dominant, exceeding Ti ion fluxes by about an order of magnitude.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10508 - Physical geography
Result continuities
Project
<a href="/en/project/LM2023039" target="_blank" >LM2023039: R&D centre for plasma and nanotechnology surface modifications</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2025
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
1879-3347
Volume of the periodical
517
Issue of the periodical within the volume
December
Country of publishing house
CH - SWITZERLAND
Number of pages
11
Pages from-to
132847
UT code for WoS article
001608169200003
EID of the result in the Scopus database
2-s2.0-105019639824