Sc-doped GeTe thin films prepared by radio-frequency magnetron sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F25%3A00142506" target="_blank" >RIV/00216224:14310/25:00142506 - isvavai.cz</a>
Alternative codes found
RIV/00216275:25310/25:39923220
Result on the web
<a href="https://www.nature.com/articles/s41598-024-84963-3" target="_blank" >https://www.nature.com/articles/s41598-024-84963-3</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1038/s41598-024-84963-3" target="_blank" >10.1038/s41598-024-84963-3</a>
Alternative languages
Result language
angličtina
Original language name
Sc-doped GeTe thin films prepared by radio-frequency magnetron sputtering
Original language description
Radio frequency magnetron co-sputtering method employing GeTe and Sc targets was exploited for the deposition of Sc doped GeTe thin films. Different characterization techniques (scanning electron microscopy with energy-dispersive X-ray analysis, X-ray diffraction, atomic force microscopy, sheet resistance temperature-dependent measurements, variable angle spectroscopic ellipsometry, and laser ablation time-of-flight mass spectrometry) were used to evaluate the properties of as-deposited (amorphous) and annealed (crystalline) Ge-Te-Sc thin films. Prepared amorphous thin films have Ge48Te52, Ge46Te50Sc4, Ge44Te48Sc8, Ge43Te47Sc10 and Ge41Te45Sc14 chemical composition. The crystallization temperatures were found in the region of ~ 153-272 °C and they increase with scandium content. Upon amorphous-crystalline material phase change, large changes in sheet resistance were measured, with electrical contrast in terms of sheet resistance ratio Rannealed/Ras-deposited in the range of 1.37.10-4 - 9.1.10-7. Simultaneously, huge variations of optical functions were found as demonstrated by absolute values of optical contrast values (at 405 nm) in the range of |Δn|+|Δk| = 1.88-3.75 reaching maximum for layer containing 8 at% of Sc.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10402 - Inorganic and nuclear chemistry
Result continuities
Project
<a href="/en/project/GA22-07635S" target="_blank" >GA22-07635S: Advanced methods of fabrication of tellurides of metalloids and post-transitions metals</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2025
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Scientific Reports
ISSN
2045-2322
e-ISSN
2045-2322
Volume of the periodical
15
Issue of the periodical within the volume
1
Country of publishing house
DE - GERMANY
Number of pages
8
Pages from-to
627
UT code for WoS article
001390116400020
EID of the result in the Scopus database
2-s2.0-85213971016