Study of oxide precipitates in silicon using X-ray diffraction techniques
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F11%3A00050295" target="_blank" >RIV/00216224:14740/11:00050295 - isvavai.cz</a>
Alternative codes found
RIV/68081723:_____/11:00371107
Result on the web
<a href="http://dx.doi.org/10.1002/pssa.201184263" target="_blank" >http://dx.doi.org/10.1002/pssa.201184263</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/pssa.201184263" target="_blank" >10.1002/pssa.201184263</a>
Alternative languages
Result language
angličtina
Original language name
Study of oxide precipitates in silicon using X-ray diffraction techniques
Original language description
The results of a study of oxide precipitates in Czochralski (CZ) grown silicon using two X-ray diffraction methods are reported. The diffuse scattering around the Bragg diffraction maxima was measured on a series of samples after various two-stage annealing treatment. Combining the analysis of diffuse scattering with other experimental techniques we were able to determine mean precipitate size and deformation field around the precipitates. The obtained data show that the deformation field is proportional to the precipitate volume and independent on the annealing temperature or annealing time. The dynamical diffraction in Laue geometry was used to measure precipitate concentration. The results are compared to the selective etching concentration measurement.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
physica status solidi (a), Applied research
ISSN
1862-6300
e-ISSN
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Volume of the periodical
208
Issue of the periodical within the volume
11
Country of publishing house
US - UNITED STATES
Number of pages
4
Pages from-to
2587-2590
UT code for WoS article
000297514200018
EID of the result in the Scopus database
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