Simultaneous determination of dispersion model parameters and local thickness of thin films by imaging spectrophotometry

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F15%3A00080452" target="_blank" >RIV/00216224:14740/15:00080452 - isvavai.cz</a>

Alternative codes found

RIV/00216305:26210/15:PU114477

Result on the web

<a href="http://dx.doi.org/10.1016/j.apsusc.2015.01.093" target="_blank" >http://dx.doi.org/10.1016/j.apsusc.2015.01.093</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.apsusc.2015.01.093" target="_blank" >10.1016/j.apsusc.2015.01.093</a>

Result language

angličtina

Original language name

Simultaneous determination of dispersion model parameters and local thickness of thin films by imaging spectrophotometry

Original language description

A least-squares data fitting procedure is developed for the analysis of measurements of thin films non-uniform in thickness by imaging spectroscopic reflectometry. It solves the problem of simultaneous least-squares fitting of film thicknesses in all image pixels together with shared dispersion model parameters. Since the huge number of mutually correlated fitting parameters prevents a straightforward application of the standard Levenberg-Marquardt algorithm, the presented procedure exploits the special structure of the specific least-squares problem. The free parameters are split into thicknesses and dispersion model parameters. Both groups of parameters are fitted alternately, utilising an unmodified Levenberg-Marquardt algorithm, correcting however the thicknesses during the dispersion model fitting step to preserve effective optical thicknesses.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2015

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Applied Surface Science

ISSN

0169-4332

e-ISSN

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Volume of the periodical

350

Issue of the periodical within the volume

SEP

Country of publishing house

GB - UNITED KINGDOM

Number of pages

7

Pages from-to

149-155

UT code for WoS article

000359166600026

EID of the result in the Scopus database

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