Protective double-layer coatings prepared by plasma enhanced chemical vapor deposition on tool steel

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F15%3A00084643" target="_blank" >RIV/00216224:14740/15:00084643 - isvavai.cz</a>
Alternative codes found
RIV/61389005:_____/15:00445107 RIV/00177016:_____/15:#0001229
Result on the web
<a href="http://www.sciencedirect.com/science/article/pii/S0257897215003217" target="_blank" >http://www.sciencedirect.com/science/article/pii/S0257897215003217</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2015.04.002" target="_blank" >10.1016/j.surfcoat.2015.04.002</a>

Result language
angličtina
Original language name
Protective double-layer coatings prepared by plasma enhanced chemical vapor deposition on tool steel
Original language description
Hydrogenated diamond-like carbon films were prepared on high-speed steel substrates using low pressure radio-frequency capacitively coupled discharge (13.56 MHz) using methane mixed either with hydrogen or argon. A dc self-bias was induced by the rf discharge and accelerated the ions towards the substrates during the whole deposition process. Prior to the carbon film deposition and to improve the adhesion, the substrates were subject to plasma nitriding and coated with a silicon oxide layer using the same reactor. The deposited films were optically characterized (UV-IR) and by using a combination of Rutherford backscattering spectroscopy and elastic recoil detection the atomic composition was determined. The carbon films high hardness (similar to 18 GPa) was assessed from indentation tests. Adhesion tests revealed critical loads up to 13.6 N for the carbon films deposited on steel substrates using silicon oxide interlayer. Friction coefficient varied from 0.02 against diamond and 0.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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