Modelling of the gas flow and plasma co-polymerization of two monomers in an atmospheric-pressure dielectric barrier discharge

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F17%3A00097537" target="_blank" >RIV/00216224:14740/17:00097537 - isvavai.cz</a>
Result on the web
<a href="https://www.sciencedirect.com/science/article/pii/S0257897216310659?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0257897216310659?via%3Dihub</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2016.10.068" target="_blank" >10.1016/j.surfcoat.2016.10.068</a>

Result language
angličtina
Original language name
Modelling of the gas flow and plasma co-polymerization of two monomers in an atmospheric-pressure dielectric barrier discharge
Original language description
We present a combined experimental and numerical study of plasma co-polymerization of maleic anhydride and acetylene in an atmospheric-pressure dielectric-barrier discharge. It combines a three-dimensional model of the gas dynamics in close-to-real geometry with a semi-analytical model of the deposition which reduces the unknown plasma chemistry into several averaged species. The unknown coefficients of the model are found by correlating it with measurements of film thickness at various deposition conditions. Even though the model is calibrated only based on spatially-resolved thickness, it is proven using FT-IR that it also makes valid predictions regarding the film composition. The predictive capabilities of the model are also tested on independent experiments, illustrating that the model retains its predictive capabilities even outside of the calibration region. The work aims not only to provide more insight into the specific deposition process but it also illustrates efficient use of numerical modelling in process control and design. (C) 2016 Elsevier B.V. All rights reserved.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)

Project
<a href="/en/project/LQ1601" target="_blank" >LQ1601: CEITEC 2020</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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